TITLE

Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching

AUTHOR(S)
Maselli, Valeria; Osellame, Roberto; Cerullo, Giulio; Ramponi, Roberta; Laporta, Paolo; Magagnin, Luca; Cavallotti, Pietro Luigi
PUB. DATE
May 2006
SOURCE
Applied Physics Letters;5/8/2006, Vol. 88 Issue 19, p191107
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report on the fabrication of microfluidic channels in fused silica using femtosecond laser irradiation followed by chemical etching. Using an astigmatically shaped beam, we achieve microchannels with circular cross section and length up to 1.5 mm. We use the same femtosecond laser, with different irradiation parameters, to fabricate high quality optical waveguides on the same substrate. The integration of microchannels and waveguides will enable a forthcoming class of biophotonic sensors.
ACCESSION #
20924721

 

Related Articles

  • Optical sensing in microfluidic lab-on-a-chip by femtosecond-laser-written waveguides. Vazquez, Rebeca Martinez; Osellame, Roberto; Cretich, Marina; Chiari, Marcella; Dongre, Chaitanya; Hoekstra, Hugo J. W. M.; Pollnau, Markus; Van den Vlekkert, Hans; Ramponi, Roberta; Cerullo, Giulio // Analytical & Bioanalytical Chemistry;Feb2009, Vol. 393 Issue 4, p1209 

    We use direct femtosecond laser writing to integrate optical waveguides into a commercial fused silica capillary electrophoresis chip. High-quality waveguides crossing the microfluidic channels are fabricated and used to optically address, with high spatial selectivity, their content....

  • Generation of high-confinement step-like optical waveguides in LiNbO3 by swift heavy ion-beam irradiation. Olivares, J.; García, G.; García-Navarro, A.; Agulló-López, F.; Caballero, O.; García-Cabañes, A. // Applied Physics Letters;5/2/2005, Vol. 86 Issue 18, p183501 

    We demonstrate a swift ion-beam irradiation procedure based on electronic (not nuclear) excitation to generate a large index jump step-like optical waveguide (Δn0≈0.2, Δne≈0.1) in LiNbO3. The method uses medium-mass ions with a kinetic energy high enough to assure that their...

  • Optical waveguide fabrication with double pulse femtosecond lasers. Nagata, Tetsuya; Kamata, Masanao; Obara, Minoru // Applied Physics Letters;6/20/2005, Vol. 86 Issue 25, p251103 

    We demonstrate the optical waveguide fabrication inside fused silica glasses using double pulse femtosecond lasers to decrease the optical loss which may be caused by nonuniformity of the refractive index change in the modified volume. The pulse separation time of the double pulses is varied...

  • Optical waveguide arrays induced in fused silica by void-like defects using femtosecond laser pulses. Méndez, C.; Vázquez de Aldana, J. R.; Torchia, G. A.; Roso, L. // Applied Physics B: Lasers & Optics;Jan2007, Vol. 86 Issue 2, p343 

    We report a new approach to the microfabrication of permanent optical waveguide arrays inside fused silica induced by focusing infrared femtosecond laser pulses with microjoule energy. These arrays consist of waveguides limited by void-like damage zones with very loose coupling among adjacent...

  • Writing optical waveguides in fused silica using 1 kHz femtosecond infrared pulses. Saliminia, A.; Nguyen, N. T.; Nadeau, M.-C.; Petit, S.; Chin, S. L.; Vallée, R. // Journal of Applied Physics;4/1/2003, Vol. 93 Issue 7, p3724 

    We have investigated the writing of waveguides in bulk pure fused silica glass with femtosecond Ti:Sapphire laser at 1 kHz repetition rate. The photoinduced tracks were characterized in terms of writing geometry (parallel and perpendicular), pulse duration (45 fs, 140 fs, and 200 fs), pulse...

  • 3D-Microstructuring of Sapphire using fs-Laser Irradiation and Selective Etching. Hörstmann-Jungemann, Maren; Gottmann, Jens; Keggenhoff, Martin // Journal of Laser Micro / Nanoengineering;2010, Vol. 5 Issue 2, p145 

    We demonstrate a technique called "In volume Selective Laser Etching" (ISLE) for fs laser micro structuring of sapphire with subsequent wet etching in HF acid for the formation of microchannels and hollow volumes. In the process the sapphire sample is irradiated and by that modified with tightly...

  • A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining. Qiao, Lingling; He, Fei; Wang, Chen; Cheng, Ya; Sugioka, Koji; Midorikawa, Katsumi // Applied Physics A: Materials Science & Processing;Jan2011, Vol. 102 Issue 1, p179 

    We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass;...

  • Very low loss GaAs/AlGaAs miniature bending waveguide with curvature radii less than 1 mm. Takeuchi, Hiroaki; Oe, Kunishige // Applied Physics Letters;1/9/1989, Vol. 54 Issue 2, p87 

    Very low loss GaAs/AlGaAs miniature bending waveguides with curvature radii less than 1 mm have been fabricated. Their propagation characteristics have been measured at wavelengths of 1.30 and 1.55 μm. Total loss of the fabricated S-bending waveguide shows no increase due to radiation loss...

  • Contact charging of silica glass particles in a single collision. Hu, W.; Xie, L.; Zheng, X. // Applied Physics Letters;9/10/2012, Vol. 101 Issue 11, p114107 

    Based on asymmetric contact, we present a contact charge model of high-energy trapped holes to predict the contact charging and explain the net charge transfer between identical silica glass surfaces in a single normal collision. Furthermore, the contact charging measurements are investigated on...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics