Negative-ion yield in low-pressure radio frequency discharges in hydrogen: Particle modeling and vibrational kinetics

Diomede, P.; Longo, S.; Capitelli, M.
March 2006
Review of Scientific Instruments;Mar2006, Vol. 77 Issue 3, p03A503
Academic Journal
A theoretical study of the complex interplay between the vibrational kinetics and the plasma dynamics in low-pressure hydrogen plasmas produced by radio frequency discharges is performed. The study is realized by means of a one-dimensional particle model with five species (e, H+, H2+, H3+, and H-) while the vibrational/dissociation kinetics is based on a continuum model and the two are self-consistently coupled. In particular, we analyze the influence of pressure.


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