Using design of experiments method to model beamlet properties

Peters, J. H.; Tartz, M.; Neumann, H.
March 2006
Review of Scientific Instruments;Mar2006, Vol. 77 Issue 3, p03B905
Academic Journal
The design of experiments approach is used to build models of the extracted beamlet current and divergence in dependence on grid parameters and plasma density employing a beamlet simulation code. Appropriate polynomial degrees for the input parameters are determined which result in a mean deviation of the models from additional simulated data of less than 4%. The derived models are obtained at a low computational effort and are helpful in designing and optimizing ion source extraction systems.


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