TITLE

Horizontal-vertical bias: Part 2

AUTHOR(S)
Mack, Chris A.
PUB. DATE
February 2006
SOURCE
Microlithography World;Feb2006, Vol. 15 Issue 1, p20
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Looks at horizontal-vertical (H-V) bias in microlithography. Causes of H-V bias; Assessment of the pitch dependence of H-V bias; Observation on an H-V bias telecentricity error sensitivity.
ACCESSION #
19833638

 

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