Measuring and Managing Cleanroom Energy Use

Tschudi, William; Mills, Evan; Tengfang Xu; Rumsey, Peter
December 2005
Heating/Piping/Air Conditioning Engineering;Dec2005, Vol. 77 Issue 12, p29
The article discusses the findings from an extensive study of energy use in 28 clean rooms. This article first explains the best practices to enable right-sizing. It then discusses air-delivery-system pressure as a design parameter with the greatest impact on power requirements. The article then touches on air-change rate as the greatest determinant in recirculation-air-handling system fan and motor sizing. Best-practice strategies to maximize exhaust-system efficiency are then discussed.


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