TITLE

Measuring and Managing Cleanroom Energy Use

AUTHOR(S)
Tschudi, William; Mills, Evan; Tengfang Xu; Rumsey, Peter
PUB. DATE
December 2005
SOURCE
Heating/Piping/Air Conditioning Engineering;Dec2005, Vol. 77 Issue 12, p29
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
The article discusses the findings from an extensive study of energy use in 28 clean rooms. This article first explains the best practices to enable right-sizing. It then discusses air-delivery-system pressure as a design parameter with the greatest impact on power requirements. The article then touches on air-change rate as the greatest determinant in recirculation-air-handling system fan and motor sizing. Best-practice strategies to maximize exhaust-system efficiency are then discussed.
ACCESSION #
19310830

 

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