Glow discharge spectroscopy for depth profile analysis: from micrometer to sub-nanometer layers

Pisonero, Jorge
December 2005
Analytical & Bioanalytical Chemistry;Dec2005, Vol. 384 Issue 1, p47
Academic Journal
This article highlights the emergence of glow discharge spectroscopy for the depth profile analysis of thin film layers. The applications of thin and ultra-thin coatings in various products has driven the growing industrial interest on the materials and their properties. Plasma sources in combination with optical emission spectrometry is the popular use of glow discharges due to the ability of the plasma to generate atomic or ionic populations directly from solid samples.


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