TITLE

# Effect of boundary conditions on the classical skin depth and nonlocal behavior in inductively coupled plasmas

AUTHOR(S)
Aman-ur-Rehman; Yi-Kang Pu
PUB. DATE
September 2005
SOURCE
Physics of Plasmas;Sep2005, Vol. 12 Issue 9, p094503
SOURCE TYPE
DOC. TYPE
Article
ABSTRACT
When the finiteness of plasma geometry is taken into account, the expression for classical skin depth is different from the one obtained for an unbounded plasma (for both the planar and cylindrical geometries). This change in the expression of the classical skin depth also changes the nonlocality parameter, which is defined as the square of the ratio of the effective mean free path to the classical skin depth. It is concluded that it is the compactness of the geometry due to the metallic boundary condition (E=0) that impacts nonlocal heating (particularly in the low-frequency regime) rather than the shape of the geometry.
ACCESSION #
18636434

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