TITLE

MEMS Packaging Update

AUTHOR(S)
Gilleo, Ken
PUB. DATE
September 2005
SOURCE
Advanced Packaging;Sep2005, Vol. 14 Issue 9, p20
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Provides an overview on the advancements in microelectromechanical systems (MEMS) packaging. Popularity of motion sensors; Advantages of ink-jet chips; Applications for inertial sensors; Surface machining process.
ACCESSION #
18287855

 

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