TITLE

Patterning of hydrogenated microcrystalline silicon growth by magnetic field

AUTHOR(S)
Fejfar, A.; Stuchlík, J.; Mates, T.; Ledinský, M.; Honda, S.; KocÇka, J.
PUB. DATE
July 2005
SOURCE
Applied Physics Letters;7/4/2005, Vol. 87 Issue 1, p011901
SOURCE TYPE
DOC. TYPE
Article
ABSTRACT
A way of influencing growth of silicon films by magnetic field is demonstrated. Permanent magnet(s) placed under the substrate influenced the discharge in a mixture of silane and hydrogen and led to formation of microcrystalline regions in otherwise amorphous film. The pattern of microcrystalline regions varied with the orientation of the magnetic field. Microscopic study by atomic force microscopy and by micro-Raman spectroscopy revealed that the microcrystalline regions resulted from a higher density of crystalline grain nuclei, increased at the locations where the magnetron effect could be expected. This phenomenon could be used to study the transition between amorphous and microcrystalline growth. Moreover, we suggest it as a kind of â€œmagnetic lithographyâ€ for the preparation of predefined microcrystalline patterns in otherwise amorphous silicon films.
ACCESSION #
18008433

Related Articles

• Large-scale Structure of the Chromospheric Doppler Velocities on the Solar Disk from 2D-spectroscopy within the He I 10830 Ã… Line. Kulagin, E. S.; Kouprianov, V. V. // Solar Physics;Jan2004, Vol. 219 Issue 1, p79

A distribution map of the large-scale chromospheric Doppler velocities on the solar disk for 5 June 2002 is presented. The map was obtained using a 2D-spectroscopy technique within the He i 10830 Ã… line. The spatial resolution of the map is about 30 arc sec. The map demonstrates a downflow...

• Molecules in high spin states III: The millimeter/submillimeter-wave spectrum of the MnCl radical (X 7Î£+). Halfen, D. T.; Ziurys, L. M. // Journal of Chemical Physics;2/1/2005, Vol. 122 Issue 5, p054309

The pure rotational spectrum of the MnCl radical (X 7Î£+) has been recorded in the range 141â€“535 GHz using millimeterâ€“submillimeter direct absorption spectroscopy. This work is the first time the molecule has been studied with rotational resolution in its ground electronic state....

• An investigation of the magnetic state dependent low frequency noise in magnetic tunnel junctions. Feng Guo; McKusky, Greg; Dahlberg, E. Dan // Applied Physics Letters;8/10/2009, Vol. 95 Issue 6, p062512

The low frequency noise in magnetic tunnel junctions was studied as a function of applied magnetic field. In magnetic states where the magnetization is reversing, the measurement indicates a 1/f2 spectrum whereas at all other applied fields a 1/f spectrum is observed. The 1/f2 spectra are found...

• IR reflectance spectra and optical constants of Al-Cu-Fe quasicrystalline thin films. Yakovlev, V.; Novikova, N.; Mattei, G.; Teplov, A.; Shaĭtura, D.; Nazin, V.; Laskova, G.; Ol’shanskiĭ, E.; Dolgiĭ, D. // Physics of the Solid State;May2006, Vol. 48 Issue 5, p821

The optical properties of Al-Cu-Fe quasicrystalline films and, for comparison, crystalline films of similar composition are studied using middle-and far-IR reflectance spectroscopy. Measurements are performed with 0.1-to 0.3-Î¼m-thick films on sapphire substrates. The complex dielectric...

• Gauge Theory Solitons on the Noncommutative Cylinder. Demidov, S. V.; Dubovsky, S. L.; Rubakov, V. A.; Sibiryakov, S. M. // Theoretical & Mathematical Physics;Feb2004, Vol. 138 Issue 2, p269

The solution-generating technique originally suggested for gauge theories on the noncommutative plane is generalized to the noncommutative cylinder. For this, we construct partial isometry operators and a complete set of orthogonal projection operators in the algebra $\mathcal\left\{A\right\}$C of...

• Transport measurements on lateral MgB2/Fe/MgB2 junctions. Fabretti, Savio; Schäfers, Markus; Schebaum, Oliver; Thomas, Patrick; Thomas, Andy // Journal of Applied Physics;Apr2012, Vol. 111 Issue 7, p07E112

The magnetic anisotropy and transport properties of superconducting MgB2 thin films on MgO (100) substrates were studied. The films were prepared by rf/dc-magnetron cosputtering and with in situ annealing temperatures of 650 Â°C. The film orientation was measured by X-ray diffractometry, which...

• Comparative studies of microwave absorption in the singlet paramagnets HoVO4 and HoBa2Cu3O x in strong pulsed magnetic fields. Kazei, Z. A.; Snegirev, V. V.; Goaran, M.; Kozeeva, L. P.; Kameneva, M. Yu. // Journal of Experimental & Theoretical Physics;Mar2008, Vol. 106 Issue 3, p550

Microwave absorption in the tetragonal singlet paramagnets HoVO4 (zircon structure) and HoBa2Cu3O x ( x ï¿½ 6, layered perovskite structure) is studied and compared in pulsed magnetic fields up to 40 T at low temperatures. These paramagnets are characterized by a singlet-doublet scheme of...

• Low frequency noise characteristics of submicron magnetic tunnel junctions. Zhong, B.; Chen, Y.; Garzon, S.; Crawford, T. M.; Webb, R. A. // Journal of Applied Physics;Apr2011, Vol. 109 Issue 7, p07C725

We report that low frequency (up to 200 kHz) noise spectra of magnetic tunnel junctions with areas 10-10 cm2 at 10 K deviate significantly from the typical 1/f behavior found in large area junctions at room temperature. In most cases, a Lorentzian-like shape with characteristic time between 0.1...

• Aharonov-Bohm effect on the PoincarÃ© disk. Lisovyy, Oleg // Journal of Mathematical Physics;May2007, Vol. 48 Issue 5, p052112

We consider formal quantum Hamiltonian of a charged particle on the PoincarÃ© disk in the presence of an Aharonov-Bohm magnetic vortex and a uniform magnetic field. It is shown that this Hamiltonian admits a four-parameter family of self-adjoint extensions. Its resolvent and the density of...

Share