Free-standing epitaxial La1-x(Sr,Ca)xMnO3 membrane on Si for uncooled infrared microbolometer

Kim, J.-H.; Grishin, A. M.
July 2005
Applied Physics Letters;7/18/2005, Vol. 87 Issue 3, p033502
Academic Journal
Ar ion beam etching and inductively coupled SF6 and C4F8 plasma-etching processes have been employed to fabricate free standing membrane from the heteroepitaxial La1-x(Sr,Ca)xMnO3(50 nm)/Bi4Ti3O12(100 nm)/CeO2(40 nm)/YSZ(30 nm) film structure pulsed laser deposited on Si(001) wafer. We demonstrate feasibility to use epitaxial colossal magnetoresistive manganite film as thermally isolated self-supporting membrane for uncooled infrared microbolometer applications.


Related Articles

  • Investigation on optical properties of Bi2.85La0.15TiNbO9 thin films by prism coupling technique. Mingfu Zhang; Hengzhi Chen; Bin Yang; Wenwu Cao // Applied Physics A: Materials Science & Processing;Dec2009, Vol. 97 Issue 4, p741 

    Layered-perovskite ferroelectric Bi2.85La0.15TiNbO9 (LBTN) optical waveguiding thin films were grown on fused silica substrates by pulsed laser deposition (PLD). X-ray diffraction (XRD) revealed that the film is highly (00 l) textured. We observed sharp and distinct transverse electric (TE) and...

  • Production and characterization of Nd,Cr:GSGG thin films on Si(001) grown by pulsed laser ablation. Willmott, P.R.; Manoravi, P.; Holliday, K. // Applied Physics A: Materials Science & Processing;2000, Vol. 70 Issue 4, p425 

    Abstract. Nd,Cr:Gd[sub 3]Sc[sub 2]Ga[sub 3]O[sub 12] (GSGG) thin films have been produced for the first time. They were grown on Si(001) substrates at 650 Celsius by pulsed laser ablation at 248nm of a crystalline Nd,Cr:GSGG target rod. The laser plume was analyzed using time-of-flight...

  • Pulsed laser ablation deposition of thin films on large substrates. Acquaviva, S.; Fernández, M.; Leggieri, G.; Luches, A.; Martino, M.; Perrone, A. // Applied Physics A: Materials Science & Processing;1999, Vol. 69 Issue 7, pS471 

    Abstract. We have designed and built an ultra-high vacuum chamber which allows thin film deposition on large area (up to 100 mm diameter) flat substrates and on three-dimensional substrates (e.g. 100 mm long, 50 mm diameter cylinders) by the pulsed laser deposition and reactive pulsed laser...

  • Oxygen content dependence of the photovoltaic characteristic of miscut manganite thin films. Ni, H.; Yu, D.; Zhao, K.; Kong, Y.-C.; Wong, H. K.; Zhao, S. Q.; Zhang, W. S. // Journal of Applied Physics;Aug2011, Vol. 110 Issue 3, p033112 

    We report the effect of oxygen stoichiometry on the photovoltaic properties of miscut managanite La0.4Ca0.6MnO3-δ epitaxial films. The oxygen content was changed by annealing the sample alternately between oxygen and vacuum annealing. With the decrease of oxygen deficiencies, the electrical...

  • Effect of microstructural heterogeneity on the mechanical behavior of nanocrystalline metal films. Rajagopalan, Jagannathan; Saif, M. Taher A. // Journal of Materials Research;11/28/2011, Vol. 26 Issue 22, p2826 

    Conventionally, mean grain size is considered the most critical microstructural parameter in determining the mechanical behavior of pure metals. By systematically controlling the distribution of grain orientations in aluminum films, we show that microstructural heterogeneity alone induces large...

  • Heteroepitaxy of Nd0.67Sr0.33MnO3 on silicon for bolometric x-ray detector application. Yong, G. J.; Kolagani, Rajeswari M.; Adhikari, S.; Drury, O. B.; Gardner, C.; Bionta, R. M.; Friedrich, S. // Review of Scientific Instruments;Nov2010, Vol. 81 Issue 11, p113906 

    We have recently reported the design concept and sensor fabrication for a novel bolometric x-ray detector based on a rare earth manganite material for application as a total energy monitor for the Linac Coherent Light Source (LCLS) free electron laser at the Stanford Linear Accelerator Center...

  • Pressure induced phase transition in periodic microtwinned thin film of La0.88Sr0.1MnO3. Razavi, F. S.; Sudhakar Rao, G. V.; Jalili, H.; Habermeier, H.-U. // Applied Physics Letters;4/24/2006, Vol. 88 Issue 17, p174103 

    We have studied the resistivity of a hole-doped 95 nm thin film of La0.88Sr0.1MnO3 sample as a function of pressure up to 2.0 GPa. For pressures below 0.81 GPa, the sample showed that the resistivity decreased at all temperatures and the metal insulator transition temperature TMI increased to...

  • Crystallization and Properties of PbO-doped Ba0.7Sr0.3TiO3 Films. Ping Sun; Matsuura, Naomi; Ruda, Harry F. // Journal of Applied Physics;9/15/2004, Vol. 96 Issue 6, p3417 

    Ferroelectric Ba0.7Sr0.3TiO3 films were fabricated using a PbO-doped barium strontium titanate sol-gel precursor. Ba0.7Sr0.3TiO3 thin films with 0, 10, 20, and 30 at.%PbO doping were deposited on bare silicon, and platinum coated silicon substrates, using spin coating. The influence of PbO...

  • Location control of giant silicon grains using organic lenses. Oh, Jae Hwan; Kim, Eun Hyun; Kim, Sang Kyu; Cheon, Jun Hyuk; Son, Yong Duck; Jang, Jin // Applied Physics Letters;12/5/2005, Vol. 87 Issue 23, p231120 

    We studied the location control of a giant grain of polycrystalline silicon produced by Ni-mediated crystallization of amorphous silicon (a-Si) using a cap layer. An organic lens made of acryl was used for the focusing of light for the seed formation and subsequent crystallization. A single...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics