TITLE

Free-standing epitaxial La1-x(Sr,Ca)xMnO3 membrane on Si for uncooled infrared microbolometer

AUTHOR(S)
Kim, J.-H.; Grishin, A. M.
PUB. DATE
July 2005
SOURCE
Applied Physics Letters;7/18/2005, Vol. 87 Issue 3, p033502
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Ar ion beam etching and inductively coupled SF6 and C4F8 plasma-etching processes have been employed to fabricate free standing membrane from the heteroepitaxial La1-x(Sr,Ca)xMnO3(50 nm)/Bi4Ti3O12(100 nm)/CeO2(40 nm)/YSZ(30 nm) film structure pulsed laser deposited on Si(001) wafer. We demonstrate feasibility to use epitaxial colossal magnetoresistive manganite film as thermally isolated self-supporting membrane for uncooled infrared microbolometer applications.
ACCESSION #
18008262

 

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