Approach to nonphotoperturbed differential capacitance measurements: A front-wing cantilever

Chang, M. N.; Chen, C. Y.; Huang, W. J.; Cheng, T. C.
July 2005
Applied Physics Letters;7/11/2005, Vol. 87 Issue 2, p023102
Academic Journal
We have developed a front-wing (FW) cantilever structure that can significantly suppress photoperturbation effects during scanning capacitance microscopy (SCM) and scanning capacitance spectroscopy (SCS) measurements. The FW cantilever provides an effective shadow area that fully covers the scan region, allowing us to synchronously obtain SCM images and the corresponding topographic images without photoperturbation problems. Nonphotoperturbed differential capacitance characteristics versus tip biases were also obtained for SCS by the use of these FW cantilevers. This means that nonphotoperturbed SCM and SCS measurements can be carried out during the typical SCM operations.


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