The death of the aerial image

Mack, Chris A.
August 2005
Microlithography World;Aug2005, Vol. 14 Issue 3, p12
Trade Publication
Focuses on the aerial image in semiconductor lithography. Information on aerial image, the image of a photomask projected onto the plane of the wafer; Effects of high numerical-aperture (NA) on imaging; Determination of the amount of interference between two electric fields; Reason behind the aerial image being a bad proxy for the final resist image for high-NA imaging.


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