Impact of high-resolution photolithography on integrated photonics

Mossberg, T. W.; Iazikov, D.; Greiner, C. M.
August 2005
Microlithography World;Aug2005, Vol. 14 Issue 3, p8
Trade Publication
Discusses the impact of high-resolution photolithography on integrated photonics. Utilization of diffractive structures to add functionality into photonic circuits; Information on grating holograms; Overview of the process involved in fabricating a silica-core wave guide grating device.


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