TITLE

Linear surface smoothening of (Ti0.48Al0.52)N thin films grown on rough substrates

AUTHOR(S)
Liu, Z.-J.; Shum, P. W.; Shen, Y. G.
PUB. DATE
June 2005
SOURCE
Applied Physics Letters;6/20/2005, Vol. 86 Issue 25, p251908
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The evolution of surface roughness during the growth of sputter-deposited solid solution (Ti0.48Al0.52)N films on rough high-speed-steel (HSS) substrates has been studied by atomic force microscopy. It has been revealed that the growing (Ti0.48Al0.52)N/HSS film experiences a continuous surface smoothening. Scaling analyses along with surface power spectra calculation of the (Ti0.48Al0.52)N films grown on smooth Si(100) substrates under the same deposition conditions indicate that this surface smoothening is linear and can be explained by a simple linear equation with surface diffusion as the smoothening mechanism and shot noise as the roughening effect. The observed linear surface smoothening in (Ti0.48Al0.52)N/HSS films has also been confirmed by our numerical simulations of the film growth using real HSS and Si(100) substrates as their initial growth conditions and can be understood in terms of the competition between the surface-diffusion-induced decrease in substrate roughness contribution and the noise-driven roughening effect.
ACCESSION #
17636594

 

Related Articles

  • Development of Robust AFM Technique for Roughness and Morphology Characterization of Gate Stack Thin Films. Wang, Charles C.; Pu Ye; Fu Li; Yi Ma; Uritsky, Yuri S. // AIP Conference Proceedings;2005, Vol. 788 Issue 1, p194 

    Surface roughness and grain morphology are among the critical parameters to be monitored during IC wafer processing, because, with the shrinking device critical dimensions, such parameters become more influential in device performance and manufacturing yield. Among the surface roughness and...

  • Effect of substrate surface on the structure and electronic properties of cubic boron nitride films. Zhou, X. T.; Sham&, T. K.; Chan, C. Y.; Zhang, W. J.; Bello, I.; Lee, S. T.; Hofsäss, H. // Journal of Applied Physics;7/1/2006, Vol. 100 Issue 1, p014909 

    Cubic boron nitride (c-BN) films were prepared by mass-selected ion beam deposition (MSIBD) technique. The effects of substrate surface roughness were investigated by boron and nitrogen k-edge x-ray absorption near-edge structure, x-ray diffraction, and atomic force microscopy. All the films are...

  • THE DYNAMICS OF RELIEF OF THIN FILM SURFACE AND DEPENDENCE ON TECHNOLOGICAL PARAMETERS IN EARLY GROWTH STAGE. Čerapaitė-Trušinskienė, R.; Galdikas, A. // International Conference: Radiation Interaction with Material & ;2006, p291 

    For the deposition of thin films it is important to know under what parameters' values film whit desirable morphology and relief will be obtained. One of the parameter which can influencing the relief of thin film is substrate temperature. As the relief of thin film is determined by the first...

  • Low-temperature preparation of highly (100)-oriented Pb(ZrxTi1-x)O3 thin film by high oxygen-pressure processing. Zhang, X. D.; Meng, X. J.; Sun, J. L.; Lin, T.; Chu, J. H. // Applied Physics Letters;6/20/2005, Vol. 86 Issue 25, p252902 

    A method for thin-film fabrication employing high oxygen-pressure processing (HOPP) was developed. With this method, the highly (100) oriented Pb(ZrxTi1-x)O3 (PZT) thin film was fabricated at temperature as low as 400 °C. HOPP is compatible to the ferroelectric PZT film integration with a...

  • Thickness dependence of magneto-transport in Cu-Co granular thin films. Wang, Jian-Qing; Dao, NgocNga; Kim, Nam H.; Whittenburg, Scott L. // Journal of Applied Physics;6/1/2004, Vol. 95 Issue 11, p6762 

    This work explores the thickness dependence of magneto-transport properties in Cu80Co20 granular thin films with different thickness. These results are compared with silver-based film series studied earlier. It was observed that the thickness dependence of the GMR effect was sensitive to the...

  • Practical Applications of XRR-XRF Metrology Tool. Nolot, Emmanuel; Michallet, André // AIP Conference Proceedings;2005, Vol. 788 Issue 1, p329 

    X-Ray Reflectometry (XRR) and micro-spot X-Ray Fluorescence (XRF) are well-known non-destructive methods to characterize thin films in terms of thickness, density, roughness and composition. We use a JVX 5200 XRR-XRF-combined Metrology Tool from Jordan Valley on a routine basis, which gives us...

  • The Use of Model Data to Characterize Depth Profile Generation from Angle Resolved XPS. Mack, P.; McIntosh, B. J.; White, R. G.; Wolstenholme, J. // AIP Conference Proceedings;2005, Vol. 788 Issue 1, p112 

    ARXPS provides a non-destructive method for producing depth profiles from ultra-thin films such as transistor gate dielectrics. The generation of depth profiles from ultra-thin films using ARXPS is not a direct process but involves calculating the ARXPS response from trial depth profiles and...

  • Textured Growth of Buffer Layer Structures for YBCO Coated Conductors. Akin, Y.; Bacaltchuk, C. M. B.; Goddard, R. E.; Celik, E.; Arda, L.; Garmestani, H.; Sigmund, W.; Hascicek, Y. S. // AIP Conference Proceedings;2004, Vol. 711 Issue 1, p653 

    Textured growth of Cerium oxide (CeO2) and 100% lattice matched (Eu0.893Yb0.107)2O3 buffer layers were investigated for YBCO coated conductors as cap layers on Gd2O3 thin films by chemical solution deposition technique. CeO2 is one of the most widely used cap layer for fabrication of coated...

  • Crystallographic and luminescent properties of orthorhombic BaAl2S4:Eu powder and thin films. Smet, Philippe F.; Van Haecke, Jo E.; Van Meirhaeghe, Roland L.; Poelman, Dirk // Journal of Applied Physics;8/15/2005, Vol. 98 Issue 4, p043512 

    BaAl2S4:Eu thin films were prepared from a multilayered BaS:Eu/Al2S3 thin-film structure, deposited with electron-beam evaporation. Depending on the deposition and postdeposition annealing temperature, europium-doped BaAl2S4 thin films can show both an orthorhombic and the more common cubic...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics