Trapping of hydrogen in argon-implanted crystalline silicon

Ma, Y.; Job, R.; Düngen, W.; Huang, Y. L.; Fahrner, W. R.; Beaufort, M. F.; Rousselet, S.; Horstmann, J. T.
June 2005
Applied Physics Letters;6/20/2005, Vol. 86 Issue 25, p252109
Academic Journal
Crystalline silicon wafers are implanted with argon ions and subsequently hydrogenated by H-plasma treatments (Sample A). The control silicon samples are solely treated by the H-plasma under identical conditions (Sample B). Depth-resolved μ-Raman spectroscopy and cross-sectional transmission electron microscopy are carried out on both samples. In Sample A, two kinds of hydrogen molecules, namely H2(I) located in vacancies, and H2(II) located in platelets are observed. It is found that the depth profile of the H2(I) molecules is consistent with that of the vacancies created by the Ar implantation, but deeper than that of H2(II) molecules (~ 0.4 versus ~ 0.3 μm). In Sample B, only the H2(II) molecules are observed. Its depth distribution extends much deeper than in Sample A (~ 1 versus ~ 0.3 μm). These results indicate that the vacancies created during Ar implantation act as trap centers to block the hydrogen diffusion into deeper wafer regions during the subsequent H-plasma treatments.


Related Articles

  • First experiments with Cs doped Mo as surface converter for negative hydrogen ion sources. Schiesko, L.; Cartry, G.; Hopf, C.; Höschen, T.; Meisl, G.; Encke, O.; Heinemann, B.; Achkasov, K.; Amsalem, P.; Fantz, U. // Journal of Applied Physics;8/21/2015, Vol. 118 Issue 7, p073303-1 

    A study was conducted on the properties of molybdenum implanted with caesium as an approach to reduce the Cs consumption of negative hydrogen ion sources based on evaporated Cs. The depth profiles of the implanted Cs were simulated by SDTrimSP and experimentally determined by X-ray photoelectron...

  • Poloidal velocity of impurity ions in neoclassical theory. Wong, S. K.; Chan, V. S.; Solomon, W. M. // Physics of Plasmas;Aug2008, Vol. 15 Issue 8, p082503 

    A formula for the poloidal velocity of impurity ions in a two-species plasma is derived from neoclassical theory in the banana regime, with corrections from the boundary layer separating the trapped and transiting ions. The formula is applicable to plasmas with toroidal rotations that can...

  • Atomic fraction of hydrogen plasma in a negative hydrogen ion source. Wada, M.; Kasuya, T.; Takahashi, H.; Takemoto, T. // Review of Scientific Instruments;May2004, Vol. 75 Issue 5, p1786 

    Hydrogen atoms effusing out from an extraction hole of a 6 cm diam and 6 cm long ion source was measured using a quadrupole mass spectrometer coupled to a neutral beam chopping system. The system background for atomic signal detection was negligible. As the discharge current was increased, the...

  • Internal kink mode stabilization and the properties of auxiliary heated ions. Graves, Jonathan P. // Physics of Plasmas;Sep2005, Vol. 12 Issue 9, p090908 

    The stability of the internal kink mode is analyzed in terms of the essential properties of auxiliary heated ions. A fundamental difference between fusion born alpha particles and auxiliary heated ions is that the latter are typically anisotropically distributed. The effect of anisotropy, which...

  • Neutralization of H- Ions on the Plasma Target. Baturin, Vladimir A.; Litvinov, Petr A. // AIP Conference Proceedings;2005, Vol. 763 Issue 1, p317 

    This work describes a plasma neutralizer for ion beams and experimental results of conversion of H- ions into neutral atoms on the plasma target. The working medium of neutralizer is thermal plasma (potassium, cesium). The neutralizer is designed for an integrated plasma target density of a...

  • Plasma-generator-induced effects on the dynamics of a negative-ion surface conversion source. van Os, C. F. A.; Leung, K. N.; Kunkel, W. B. // Journal of Applied Physics;3/15/1991, Vol. 69 Issue 6, p3485 

    Focuses on a study which investigated the production of hydrogen ions at a barium, magnesium, strontium, molybdenum, and lanthanum-hexaboride converter immersed in a hydrogen plasma for pulsed and direct current discharges. Description of the experiment on filament discharges; Comparison of...

  • Effects of the radial electric field on the confinement of trapped fast ions in the Wendelstein 7-X and Helias reactor. Kolesnichenko, Ya. I.; Lutsenko, V. V.; Tykhyy, A. V.; Weller, A.; Werner, A.; Wobig, H.; Geiger, J. // Physics of Plasmas;Jul2006, Vol. 13 Issue 7, p072504 

    Confinement of trapped fast ions in the Wendelstein-line stellarators in the presence of the radial electric field, Er, is studied. It is shown that negative electric field improves the confinement; in particular, a radially localized field can play the role of a transport barrier for the ions...

  • Surface Plasma Source Electrode Activation by Surface Impurities. Dudnikov, Vadim; Han, B.; Johnson, Rolland P.; Murray, S. N.; Pennisi, T. R.; Santana, M.; Stockli, Martin P.; Welton, R. F. // AIP Conference Proceedings;9/26/2011, Vol. 1390 Issue 1, p411 

    In experiments with RF saddle antenna surface plasma sources (SPS), the efficiency of H- ion generation was increased by up to a factor of 5 by plasma electrode 'activation', without supplying additional Cs, by heating the collar to high temperature for several hours using hot air flow and...

  • Cylindrical Penning trap for the study of electron plasmas. Amoretti, M.; Bettega, G.; Cavaliere, F.; Cavenago, M.; De Luca, F.; Pozzoli, R.; Romé, M. // Review of Scientific Instruments;Sep2003, Vol. 74 Issue 9, p3991 

    The ELTRAP device installed at the Department of Physics of the University of Milan is a Malmberg–Penning trap, with a magnetic field up to 0.2 T, equipped with charge coupled device optical diagnostics. It is intended to be a small scale facility for electron plasma and beam dynamics...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics