Effect of duty cycle on plasma parameters in the pulsed dc magnetron argon discharge

Sang-Hun Seo; Jung-Hwan In; Hong-Young Chang; Jeon-Geon Han
June 2005
Applied Physics Letters;6/27/2005, Vol. 86 Issue 26, p262103
Academic Journal
The time-resolved probe measurements of the plasma parameters and the electron energy distribution function are carried out in a unipolar pulsed dc magnetron argon discharge. The cathode target is driven by the 20 kHz midfrequency unipolar dc pulses at three operating modes, such as constant voltage, constant power, and constant current with the duty cycles ranging from 10% to 90%. It is observed that as the duty cycle is reduced, the electron temperature averaged during the pulse-on period rapidly increases irrespective of the operating mode although the average electron density strongly depends on the operating mode. The comparison of the measured electron energy distribution functions shows that the electron heating during the pulse-on period becomes efficient in the pulse operation with short duty cycle, which is closely related to the deep penetration of the high-voltage sheath into the bulk during the pulse-on period.


Related Articles

  • Effects of substrate bias on electron energy distribution in magnetron sputtering system. Sang-Hun Seo; Jung-Hwan In; Hong-Young Chang; Jeon-Geon Han // Physics of Plasmas;Oct2004, Vol. 11 Issue 10, p4796 

    In the downstream region of an unbalanced magnetron argon discharge, the influences of substrate bias (i.e., the condition of plasma boundary) on electron energy distribution function and plasma characteristics were investigated through the experiments using a single Langmuir probe. In a steady...

  • Production of high-density sheet plasma by an rf magnetron device with high-frequency operation. Murata, Kenji; Okuno, Yoshihiro; Fujita, Hiroharu // Review of Scientific Instruments;Mar94, Vol. 65 Issue 3, p673 

    Production of a sheet plasma with a high electron density is successfully realized in an rf magnetron device with a rectangular hollow cathode by operating at a high driving frequency. The electron density ne of the sheet plasma increased up to about 2×1011 cm-3 with the relation of...

  • Measurements of the electron energy distribution function in an Ar/CF[sub 4] inductively coupled plasma. Bowden, M. D.; Tabata, R.; Suanpoot, P.; Uchino, K.; Muraoka, K.; Noguchi, M. // Journal of Applied Physics;9/1/2001, Vol. 90 Issue 5 

    Measurements of the electron energy distribution function (eedf) of a low-pressure inductively coupled plasma operated in a mixture of Ar and CF[sub 4] are reported. The measurement method was laser Thomson scattering. Extensive test were performed in order to verify that any perturbations...

  • Determination of the Electron Density and Electric Field in the Plasma of a Low-Pressure Microwave Electrode Discharge in Hydrogen from the Measured Spectral Line Intensities. Lebedev, Yu. A.; Mokeev, M. V. // Plasma Physics Reports;Nov2003, Vol. 29 Issue 11, p983 

    The parameters of the plasma of a microwave electrode discharge in hydrogen at pressures of 1�8 torr and incident powers of 20�80 W are measured by the so-called �relative intensity� method. The method allows one to determine the electron density and electric field in plasma...

  • Dusty Sprite-plasma and Conditions for its Formation. Serozhkin, Yuriy // AIP Conference Proceedings;2005, Vol. 799 Issue 1, p383 

    Plasma of sprites (electric discharges in mesosphere at altitudes 50...90 km) can have the properties of dusty plasma in case of an ingress of dusty component in the area of sprites. It is possible to tell about transition of the sprite-plasma to Coulomb fluid if in some zone of sprite exists...

  • Generation of uniform atmospheric pressure argon glow plasma by dielectric barrier discharge. TYATA, RAJU; SUBEDI, DEEPAK; SHRESTHA, RAJENDRA; WONG, CHIOW // Pramana: Journal of Physics;Mar2013, Vol. 80 Issue 3, p507 

    In this paper, atmospheric pressure glow discharges (APGD) in argon generated in parallel plate dielectric barrier discharge system is investigated by means of electrical and optical measurements. Using a high voltage (0-20 kV) power supply operating at 10-30 kHz, homogeneous and steady APGD has...

  • Numerical simulation of atomic nitrogen formation in plasma of glow discharge in nitrogen-argon mixture. Khomich, V. A.; Ryabtsev, A. V.; Didyk, E. G.; Zhovtyansky, V. A.; Nazarenko, V. G. // Technical Physics Letters;Oct2010, Vol. 36 Issue 10, p918 

    We consider the problem of determining the content of atomic nitrogen as an active component responsible for the efficiency of metal surface modification in plasma of stationary low-pressure glow discharge in nitrogen-argon mixture (widely used in this technology). The influence of the gas...

  • Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar. Ishimaru, M.; Ohba, T.; Ohmori, T.; Yagisawa, T.; Kitajima, T.; Makabe, T. // Applied Physics Letters;2/18/2008, Vol. 92 Issue 7, p071501 

    An experimental procedure to investigate the spatiotemporal characteristics of electrons in the vicinity of mean energy in a radiofrequency plasma is proposed by using optical emission and absorption spectroscopy in Ar. The method employs optical kinetics of long-lived metastable atom Ar(1s5)...

  • Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study. Kortshagen, U.; Pukropski, I.; Zethoff, M. // Journal of Applied Physics;8/15/1994, Vol. 76 Issue 4, p2048 

    Presents a study which analyzed the spatial dependence of the electron distribution function (EDF) and of related macroscopic parameters in an inductively coupled argon plasma at 13.56 megahertz. Generation of the radio frequency induction field; Function of the total energy of electrons; Way...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics