Enhanced functionality of cantilever based mass sensors using higher modes

Dohn, Søren; Sandberg, Rasmus; Svendsen, Winnie; Boisen, Anja
June 2005
Applied Physics Letters;6/6/2005, Vol. 86 Issue 23, p233501
Academic Journal
By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.


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