TITLE

Gold film with gold nitride—A conductor but harder than gold

AUTHOR(S)
Sˇiller, L.; Peltekis, N.; Krishnamurthy, S.; Chao, Y.; Bull, S. J.; Hunt, M. R. C.
PUB. DATE
May 2005
SOURCE
Applied Physics Letters;5/30/2005, Vol. 86 Issue 22, p221912
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The formation of surface nitrides on gold films is a particularly attractive proposition, addressing the need to produce harder, but still conductive, gold coatings which reduce wear but avoid the pollution associated with conventional additives. Here we report production of large area gold nitride films on silicon substrates, using reactive ion sputtering and plasma etching, without the need for ultrahigh vacuum. Nanoindentation data show that gold nitride films have a hardness ∼50% greater than that of pure gold. These results are important for large-scale applications of gold nitride in coatings and electronics.
ACCESSION #
17249984

 

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