Microfabricated SrTiO3 ridge waveguides

Gaidi, M.; Stafford, L.; Margot, J.; Chaker, M.; Morandotti, R.; Kulishov, M.
May 2005
Applied Physics Letters;5/30/2005, Vol. 86 Issue 22, p221106
Academic Journal
We report the microfabrication and characterization of SrTiO3/SiO2/Si ridge waveguides. SrTiO3 films are very attractive for optical integrated systems as they present a high transparency in the visible and infrared wavelength range as well as a relatively high refractive index. In this work, SrTiO3 films were grown by means of a reactive pulsed-laser-deposition technique and patterned using UV photolithography and high-density plasma etching. Propagation and loss characteristics at the telecommunication wavelength of 1.55 μm were investigated using top-view scattering and Fabry-Perot resonance methods. For specific ridge widths, we obtained single-mode propagation with relatively low losses (∼1.5 dB/cm), thereby demonstrating the strong potential of SrTiO3 films for guided-wave components for advanced optical integrated systems.


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