Micromachined chemical sensor with dual-transduction mechanisms

Chen, Ing-Shin; Stawasz, Michele; DiMascio, Susan K.; Welch, James J.; Neuner, Jeffrey W.; Chen, Philip S. H.; DiMeo, Frank
April 2005
Applied Physics Letters;4/25/2005, Vol. 86 Issue 17, p173510
Academic Journal
Chemical sensors based on a microhotplate platform generally function via a conductometric or calorimetric transduction mechanism. In addition to these mechanisms, a mechanical transduction mechanism is proposed based on the detection of the microhotplate bending due to volume change of functional layers. In this letter, we demonstrate sensing of gaseous hydrogen based on volumetric expansion of Pd/Y functional layers. In this case, the embedded polysilicon heater element also serves as the piezoresistive strain-detecting element, changing its resistance as the microhotplate bends. This transduction mechanism can be used independently of, or in conjunction with, a simultaneous conductometric or calorimetric mechanism.


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