Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning

Yi-Chung Tung; Katsuo Kurabayashi
April 2005
Applied Physics Letters;4/18/2005, Vol. 86 Issue 16, p161113
Academic Journal
We demonstrate strain-controlled gratings made of an organic elastomer, polydimethylsiloxane (PDMS), which can achieve optical wavelength tuning by varying their spatial periods. The whole device structure presented in this work incorporates a nanoimprinted PDMS grating integrated with electrostatic microelectromechanical systems actuators on a silicon chip. The fabrication of the device combines polymer soft lithography, nanoimprint lithography, and silicon micromachining across multiscale dimensions ranging from a few hundred nanometers to a few millimeters. The fine tuning capability with fast dynamic response of our PDMS/silicon hybrid optical grating device makes it attractive for use in various micro-optical instruments.


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