Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon

Huang, S. M.; Sun, Z.; Luk'yanchuk, B. S.; Hong, M. H.; Shi, L. P.
April 2005
Applied Physics Letters;4/18/2005, Vol. 86 Issue 16, p161911
Academic Journal
Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.


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