TITLE

Room-temperature semiconductor gas sensor based on nonstoichiometric tungsten oxide nanorod film

AUTHOR(S)
Yong Shin Kim; Ha, Seung-Chul; Kim, Kyuwon; Yang, Haesik; Choi, Sung-Yool; Kim, Youn Tae; Park, Joon T.; Lee, Chang Hoon; Choi, Jiyoung; Paek, Jungsun; Lee, Kwangyeol
PUB. DATE
May 2005
SOURCE
Applied Physics Letters;5/23/2005, Vol. 86 Issue 21, p213105
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Porous tungsten oxide films were deposited onto a sensor substrate with a Si bulk-micromachined hotplate, by drop-coating isopropyl alcohol solution of highly crystalline tungsten oxide (WO2.72) nanorods with average 75 nm length and 4 nm diameter. The temperature-dependent gas sensing characteristics of the films have been investigated over the mild temperature range from 20 to 250 °C. While the sensing responses for ammonia vapor showed increase in electrical conductivity at temperatures above 150 °C as expected for n-type metal oxide sensors, they exhibited the opposite behavior of unusual conductivity decrease below 100 °C. Superb sensing ability of the sensors at room temperature in conjunction with their anomalous conductivity behavior might be attributed to unique nanostructural features of very thin, nonstoichiometric WO2.72.
ACCESSION #
17226919

 

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