Low-energy ion irradiation during film growth: Kinetic pathways leading to enhanced adatom migration rates

Adamovic, D.; Münger, E. P.; Chirita, V.; Hultman, L.; Greene, J. E.
May 2005
Applied Physics Letters;5/23/2005, Vol. 86 Issue 21, p211915
Academic Journal
Embedded-atom molecular dynamics simulations are used to investigate the effects of low-energy self-ion irradiation of Pt adatoms on Pt(111). Here, we concentrate on self-bombardment dynamics, i.e., isolating and monitoring the atomic processes, induced by normally incident Pt atoms with energies E ranging from 5 to 50 eV, that can affect intra- and interlayer mass transport.. We find that adatom scattering, surface channeling, and dimer formation occur at all energies. Atomic intermixing events involving incident and terrace atoms are observed at energies >=15 eV, while the collateral formation of residual surface vacancies is observed only with E>40 eV. The overall effect of low-energy self-ion irradiation is to enhance lateral adatom and terrace atom migration.


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