Galvanic effects in Si-based microelectromechanical systems: Thick oxide formation and its implications for fatigue reliability

Pierron, O. N.; Macdonald, D. D.; Muhlstein, C. L.
May 2005
Applied Physics Letters;5/23/2005, Vol. 86 Issue 21, p211919
Academic Journal
Nanometer-scale reaction layers have a profound impact on the fracture and fatigue resistance of the Si films used in microelectromechanical systems (MEMS). This letter presents experimental evidence that thick (i.e., greater than 10 nm) oxides can form at room temperature during manufacturing due to a galvanic effect between n+-type Si and Au. The growth of such oxides in concentrated HF solutions that are usually associated with oxide dissolution can be predicted from the measured current density–voltage (i–V) behavior and geometry of the galvanic couple. These results can account for unexplained findings in the literature and can be used to improve the performance of MEMS.


Related Articles

  • Selectivity/etch rate trade-offs in deep and high A/R oxide etching. Chambers, A. A. // Solid State Technology;Feb2005, Vol. 48 Issue 2, p56 

    The article presents information about selective etching of silicon oxides. Processes employed in mass-produced microelectromechanical systems (MEMS) fabrication exhibit the some basic characteristics, but are adjusted to accommodate the considerably greater etch depths required by many emerging...

  • MECHATRONIC TECHNOLOGIES USED IN INFO-DOCUMENTARY STRUCTURES AUTOMATISATION. Repanovici, Angela; Cristea, Luciana; Koukourakis, Manolis // Revista Metrologie;2010, Vol. 57 Issue 4, p17 

    Starting from the necessity of re-thinking the place, the role and the purpose of the library institution and of the librarian in the relation information - beneficiary, the team of authors make up an analysis with respect to the possibilities of implementing several feasible and state-of-art...

  • Intelligent automation by mechatronic design. Leonhardt, Jörg // Process & Control Engineering (PACE);Feb2007, Vol. 60 Issue 1, p14 

    An interview with Jörg Leonhardt, CEO of Innovation Management for SEW-Eurodrive GmbH & Co., is presented. When asked about the importance of mechatronics, he stated that it helps in the automation of various equipment. He points out that the process features decentralised control over...

  • MEMS loop heat pipe based on coherent porous silicon technology. Cytrynowicz, Debra; Hamdan, Mohammed; Medis, Praveen; Shuja, Ahmed; Henderson, H. Thurman; Gerner, Frank M.; Golliher, Eric // AIP Conference Proceedings;2002, Vol. 608 Issue 1, p220 

    This paper discusses the theory, modeling, design, fabrication and preliminary test results of the MEMS loop heat pipe being developed at the Center for Microelectronic Sensors and MEMS at the University of Cincinnati. The emphasis is placed upon the silicon micro wick and its production through...

  • You can't just say it's reliable.  // Test & Measurement World;Feb2011, Vol. 31 Issue 1, p19 

    In this article the author talks about the role of mechatronics in understanding the system failure of complex mechanical systems. He informs that mechatronics can increase the reliability of a system with prognostics, diagnostics and built-in test capabilities. Mechatronic system adopts a...

  • Assumptions of Centering -- Leveling Device Application in Mechatronic Angle Measuring System. ŠIAUDINYTE, Lauryna; SABAITIS, Deividas; RYBOKAS, Mindaugas; BRUČAS, Domantas // Solid State Phenomena;2014, Vol. 220-221, p391 

    This paper deals with the presentation of the new centering -- leveling device developed in Vilnius Gediminas Technical University. Precision angle measuring systems are always combined of many mechanisms and devices which influence angle measurement accuracy. Therefore, every one of them has to...

  • Machine tools that think for themselves. Joyce, Mary E. // Design News;6/8/92, Vol. 48 Issue 11, p31 

    This article reports that Mechatronics, a new field of research aimed at developing superior functions of machine-tool controls by using a combination of advanced electronics and mechanical-engineering technologies, has been sprearheaded by Kazuo Yamazaki, engineering professor, University of...

  • Mama Don't Take My Kodachrome Away! Craig, Kevin // Design News;4/7/2008, Vol. 63 Issue 5, p20 

    The article discusses how mechatronics enables digital cameras. Mechatronics implies the integration of sensors, actuators, electronics, materials and shutter of a camera. Common active autofocus systems have an emitter and detector and use either echo technology of radar and sonar or...

  • MEMS on the Move: Motion Sensors for the Masses. Allan, Roger // Electronic Design;6/7/2007, Vol. 55 Issue 12, p43 

    The article discusses the benefits of steady advances in low-cost, low-power, and small-size advances brought about by the maturation in the design and manufacturing methods of microelectromechanicalsystem (MEMS) sensor technology. Intricately, the advancement of these accelerators and...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics