Lateral-field-excited thin-film Lamb wave resonator

Bjurström, Johan; Katardjiev, Ilia; Yantchev, Ventsislav
April 2005
Applied Physics Letters;4/11/2005, Vol. 86 Issue 15, p154103
Academic Journal
The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves.


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