Electrical properties of plasma display panel with Mg1-xZnxO protecting thin films deposited by a radio frequency magnetron sputtering method

Jung, E. Y.; Lee, S. G.; Sohn, S. H.; Lee, D. K.; Kim, H. K.
April 2005
Applied Physics Letters;4/11/2005, Vol. 86 Issue 15, p153503
Academic Journal
In order to improve the material properties of the protective layer for alternating current plasma display panels, a small amount of ZnO was added to the MgO protective layer. The electrical properties and the surface characteristics of the Mg1-xZnxO films, deposited by a radio frequency magnetron sputtering method, were investigated. As the concentration of ZnO increases, the crystallinity of Mg1-xZnxO thin films improves and the grain size becomes larger. The firing and the sustaining voltages of panels with the Mg1-xZnxO protective layers, when the concentration of ZnO was 0.5 at. %, was reduced by 20 V, compared with the conventional panels with the MgO protective layers. It was also found that the panels with Mg1-xZnxO protective layers show the higher discharge intensity as the ZnO content increases at the same applied voltages, compared with panels with the conventional MgO protective layers.


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