High-efficiency diffractive x-ray optics from sectioned multilayers

Kang, H. C.; Stephenson, G. B.; Liu, C.; Conley, R.; Macrander, A. T.; Maser, J.; Bajt, S.; Chapman, H. N.
April 2005
Applied Physics Letters;4/11/2005, Vol. 86 Issue 15, p151109
Academic Journal
We investigate the diffraction properties of sectioned multilayers in Laue (transmission) geometry, at hard x-ray energies (9.5 and 19.5 keV). Two samples are studied, a W/Si multilayer of 200×(29 nm) periods, and a Mo/Si multilayer of 2020×(7 nm) periods, with cross-section depths ranging from 2 to 17 μm. Reflectivities as high as 70% are observed. This exceeds the theoretical limit for standard zone plates operating in the multibeam regime, demonstrating that all of the intensity can be directed into a single diffraction order in small-period structures.


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