TITLE

Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography

AUTHOR(S)
Jae-Hwang Lee; Chang-Hwan Kim; Yong-Sung Kim; Kai-Ming Ho; Constant, Kristen; Wai Leung; Cha-Hwan Oh
PUB. DATE
May 2005
SOURCE
Applied Physics Letters;5/16/2005, Vol. 86 Issue 20, p204101
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We studied the first-order diffracted moiré fringes of transparent multilayered structures comprised of irregularly deformed periodic patterns. By a comparison study of the diffracted moiré fringe pattern and detailed microscopy of the structure, we show that the diffracted moiré fringe can be used as a nondestructive tool to analyze the alignment of multilayered structures. We demonstrate the alignment method for the case of layer-by-layer microstructures using soft lithography. The alignment method yields high contrast of fringes even when the materials being aligned have very weak contrasts. The imaging method of diffracted moiré fringes is a versatile visual tool for the microfabrication of transparent deformable microstructures in layer-by-layer fashion.
ACCESSION #
17164937

 

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