Laser Etching and Polishing of Quartz Tubes

Sysoev, V. K.
March 2003
Glass & Ceramics;Mar/Apr2003, Vol. 60 Issue 3/4, p106
Academic Journal
A technology and a plant for laser etching and polishing of quartz tubes are considered, which makes it possible to remove the surface layer of impurities and cracks and polish the tube surface without a direct contact. This technology provides for improved quality of tubes for diffusion furnaces and ultraviolet illuminators.


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