Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition

Shi, J.; Lu, Y. F.; Chen, X. Y.; Cherukuri, R. S.; Mendu, K. K.; Wang, H.; Batta, N.
March 2005
Applied Physics Letters;3/28/2005, Vol. 86 Issue 13, p131918
Academic Journal
Diamond-like carbon (DLC) films were deposited on tungsten (W) tips under the KrF excimer laser in a laser chemical vapor deposition (LCVD) chamber. Raman spectroscopy showed that the deposited DLC films were phase-graded along the tips from the apexes. The DLC films were more diamondlike at or near the tip apexes. From numerical simulation, there is a strongly confined and enhanced optical field at the tip apexes. The simulation also indicates that there is an optical-field gradient from tip apexes to tip bodies. Therefore, the variations in the phases of deposited DLC films were attributed to the corresponding variations in local optical intensities along the tips. Hence, optical local near field was confirmed to be responsible to the DLC deposition.


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