TITLE

Preparation and structural characteristics of ZrT4 thin films by plasma enhanced chemical vapor deposition

AUTHOR(S)
Lee, Won Gyu; Yang, O-Bong
PUB. DATE
December 2003
SOURCE
Journal of Materials Science Letters;Dec2003, Vol. 22 Issue 23, p1679
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The article reports that lead zirconate titanate (PZT) is a well known ceramic solid solution, which has attracted much attention for applications in ferroelectric, piezoelectric and optical devices. Interest in PZT thin films has rapidly grown with active studies directed toward exploring several ferroelectric compositions while involving a variety of deposition techniques. The key element in high quality PZT thin films for the application of several devices has been the ability to deposit them in a reproducible process.
ACCESSION #
16693733

 

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