TITLE

Oxygen tracer diffusion in Pb(Zr,Ti)O3 thin film enhanced by catalytic platinum

AUTHOR(S)
Cross, J. S.; Kurihara, K.; Kamehara, N.; Haneda, H.; Sakaguchi, I.
PUB. DATE
April 2005
SOURCE
Applied Physics Letters;4/4/2005, Vol. 86 Issue 14, p141909
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The self-diffusion of 18O into Pb(Zr,Ti)O3 [PZT] thin films on Pt/TiO2 coated Si wafers from an ambient of 99% 18O2 gas tracer was investigated by secondary ion mass spectroscopy (SIMS) when annealed at 450 °C, 550 °C, and 650 °C for up to 30 min. The results show that the 18O profile in PZT changed significantly with anneal temperature and the highest concentration of exchanged oxygen was at the PZT/Pt interface when annealed at 650 °C. Modeling of the oxygen tracer diffusion profiles from the 450 °C and 550 °C data yielded an activation energy of 0.83 eV when assuming 1D diffusion. Simulation of the 650 °C SIMS data indicated that the oxygen was dissociating on the catalytic Pt film underneath the PZT and then back diffusing into the PZT causing a higher concentration of oxygen at the PZT/Pt interface than at the surface.
ACCESSION #
16669590

 

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