Thermal decomposition of sputtered thin PtOx layers used in super-resolution optical disks

Kolobov, A. V.; Wilhelm, F.; Rogalev, A.; Shima, T.; Tominaga, J.
March 2005
Applied Physics Letters;3/21/2005, Vol. 86 Issue 12, p121909
Academic Journal
Decomposition of sputtered PtOx layers has been studied by x-ray absorption spectroscopy. X-ray absorption fine structure measurements demonstrated that as-deposited films possess a composition of PtOx (x=1.1–1.7). Upon annealing, the metallic platinum phase is formed. The formation of the metallic Pt phase starts at very early stages of the decomposition process. The decomposition is not monotonic and slows down at the final stage. The structure at intermediate stages of decomposition is a mixture of the starting phase and metallic Pt.


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