TITLE

Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films

AUTHOR(S)
Ai-Ying Wang; Hyo-Shin Ahn; Kwang-Ryeol Lee; Jae-Pyoung Ahn
PUB. DATE
March 2005
SOURCE
Applied Physics Letters;3/14/2005, Vol. 86 Issue 11, p111902
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Unusual stress behavior was observed in W-incorporated hydrogenated amorphous carbon films prepared by a hybrid process composed of ion-beam deposition and magnetron sputtering. As the tungsten concentration increased from 0 to 2.8 at.%, the residual compressive stress decreased by 50%, without significant deterioration in the mechanical properties. This was followed by a rapid increase and a gradual decrease in the residual stress with increasing W concentration. High-resolution transmission electron microscopy analysis and first-principle calculations show that the reduced directionality of the W–C bonds in the W-incorporated amorphous carbon matrix relaxes the stress caused by the distorted bonds.
ACCESSION #
16581661

 

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