40 000 pixel arrays of ac-excited silicon microcavity plasma devices

Park, S.-J.; Chen, K.-F.; Ostrom, N. P.; Eden, J. G.
March 2005
Applied Physics Letters;3/14/2005, Vol. 86 Issue 11, p111501
Academic Journal
Arrays of (50 μm)2 Si microcavity plasma devices, as large as 40 000 pixels (200×200) with a packing density of 104 pixels cm-2, have been operated continuously in 500–900 Torr of Ne with ac excitation (5–20 kHz). More than two orders of magnitude larger than previously reported microplasma device arrays, 200×200 pixel structures produce uniform glow discharges in each pixel, have a power consumption of ∼0.85 W cm-2 for pNe=700 Torr and an excitation frequency of 5 kHz, and exhibit maximum radiative efficiency for a Ne pressure of pNe≅700 Torr and an excitation frequency of 10–15 kHz. All arrays examined (10×10→200×200) are characterized by pixel-to-pixel emission intensities constant over the entire array to within ±10%, and no barriers to the successful operation of much larger arrays are apparent.


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