Effects of ferroelectric fatigue on the piezoelectric properties (d33) of tetragonal lead zirconate titanate thin films

Gerber, P.; Kügeler, C.; Ellerkmann, U.; Schorn, P.; Böttger, U.; Waser, R.
March 2005
Applied Physics Letters;3/14/2005, Vol. 86 Issue 11, p112908
Academic Journal
The fatigue of the electromechanical properties of tetragonal PbZrx, Ti1-xO3 thin films is investigated. The decrease of electromechanical small-signal response is compared to the fatigue of the electric properties and examined in detail. Property fatigue is attributed mainly to switching-failure of the unit cells.


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