Work function uniformity of Al–Ni alloys obtained by scanning Maxwell-stress microscopy as an effective tool for evaluating metal transistor gates

Matsukawa, Takashi; Yasumuro, Chiaki; Yamauchi, Hiromi; Masahara, Meishoku; Suzuki, Eiichi; Kanemaru, Seigo
February 2005
Applied Physics Letters;2/28/2005, Vol. 86 Issue 9, p094104
Academic Journal
Work function control of metal transistor gates was implemented with Al–Ni alloys. In addition to obtaining conventional capacitance-voltage (C-V) measurements to evaluate the work function, we microscopically characterized the work function distribution through scanning Maxwell-stress microscopy (SMM). The C-V curves of the Al–Ni alloys that we investigated exhibited work functions approximately between those of Al and Ni. The SMM analysis revealed that an Al–Ni alloy fabricated by the interdiffusion of a Ni/Al stack had a significant nonuniformity of the work function. This nonuniformity correlated with degradation of the C-V characteristics for interdiffused Al–Ni alloys.


Related Articles

  • Microstructural Transitions in Commercial Fe-Ni—Based Soft-Magnetic Alloys Quenched from Undercooled Liquid Droplets. Woodcock, T. G.; Shuleshova, O.; Gehrmann, B.; Löser, W. // Metallurgical & Materials Transactions. Part A;Dec2008, Vol. 39 Issue 12, p2906 

    Liquid droplets of three commercial Fe-Ni –based alloys were undercooled to different temperatures by electromagnetic levitation and quenched. Discontinuous changes in the grain size and microstructure as a function of melt undercooling (Δ T) were observed in all three alloys. At...

  • NixCd1-xO: Semiconducting alloys with extreme type III band offsets. Francis, Christopher A.; Detert, Douglas M.; Guibin Chen; Dubon, Oscar D.; Yu, Kin M.; Walukiewicz, Wladek // Applied Physics Letters;1/12/2015, Vol. 106 Issue 2, p1 

    We have synthesized alloys of NiO and CdO that exhibit an extreme type III band offset and have studied the structural, electrical, and optical properties of NixCd1-xO over the entire composition range. The alloys are rocksalt structured and exhibit a monotonic shift of the (220) diffraction...

  • Materials Communications: Nonequilibrium effects of primary solidification on peritectic reaction and transformation in undercooled peritectic Fe-Ni alloy. Chen, Y. Z.; Liu, F.; Yang, G. C.; Zhou, Y. H. // Journal of Materials Research;Jun2010, Vol. 25 Issue 6, p4 

    Applying the glass fluxing method, a peritectic Fe-Ni alloy with a composition of Fe-4.35 at.% Ni was undercooled. It was found that when the initial melt undercooling (?T) is smaller than 130 K, the overall thickness of the peritectic phase formed in peritectic reaction (PR) and peritectic...

  • RESEARCHES ON ALUMINIUM FLUIDITY AND ON SOME OF ALUMINIUM BASE ALLOYS. Hreniuc, Laurentiu; Gheorghe, Florea // Metalurgia International;Mar2012, Vol. 17 Issue 3, p18 

    We have studied the influence of temperature and content of some alloy elements, iron and nickel, on aluminium fluidity. The study has been done on samples produced by spiral pattern

  • High-temperature-strength NICKEL ALLOY. Agarwal, D.C.; Brill, U. // Advanced Materials & Processes;Oct2000, Vol. 158 Issue 4, p31 

    Details the chemistry, physical metallurgy, and mechanical properties of alloy 602CA, a nickel-base alloy. Chemistry of the alloy; Additions made on the properties of the alloy; Fabricability and weldability of the alloy; Applications of alloy 602CA.

  • Properties and Heat Treatment of High Transition Temperature Ni-Ti-Hf Alloys. Wojcik, C. Craig // Journal of Materials Engineering & Performance;Oct2009, Vol. 18 Issue 5/6, p511 

    The high transition temperature Ni-Ti (Hf, Zr) alloys have long been of interest for actuators and other applications requiring transition temperatures greater than 100 °C. Unfortunately, the high hardness and poor fabricability of these alloys have prohibited the scale up to commercial...

  • Intermartensitic transformations in Ni2Mn1-xCoxGa Heusler alloys. Khan, Mahmud; Stadler, Shane; Ali, Naushad // Journal of Applied Physics;4/15/2006, Vol. 99 Issue 8, p08M705 

    Ni2MnGa that possesses a Heusler L21 structure undergoes a martensitic transformation from the parent cubic (austenitic) phase to a low temperature complex tetragonal structure at TM=202 K and has a Curie temperature of TC=376 K. Some research groups have observed an intermartensitic...

  • Micrestructures and Mechanical Properties of two-phase FeNiMnAI Alloys. Baker, Ian; Xiaolan Wu; Fanling Meng; Munroe, Paul R. // Materials Science Forum;2014, Vol. 783-786, p2549 

    This paper presents an overview of the microstructures found in a range of two-phase FeNiMnAI alloys ranging from near-equiatomic very high-strength nanostructured alloys, such Fe30Ni20Mn25Al25, to more ductile fc.c./B2 alloys, such as Fe30Ni20Mn35Al15. The effect of annealing at 823 K on the...

  • Electrical study of ferromagnet-oxide-semiconductor diode for a magnetic memory device integrated on silicon. Kanoun, M.; Benabderrahmane, R.; Duluard, C.; Baraduc, C.; Bruyant, N.; Bsiesy, A.; Achard, H. // Applied Physics Letters;5/7/2007, Vol. 90 Issue 19, p192508 

    This work focuses on electrical characterization of NiFe/SiO2/Si tunnel diodes that can be used for spin injection into silicon in future spintronic devices. Capacitance-voltage characteristics show a large increase of the Si/SiO2 interfacial state density compared to similar Al/SiO2/Si diodes....


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics