Performance improvement of polycrystalline diamond ultraviolet photodetectors by room-temperature plasma treatment

Wang, S. G.; Sellin, P. J.; Lohstroh, A.; Qing Zhang
February 2005
Applied Physics Letters;2/28/2005, Vol. 86 Issue 9, p093503
Academic Journal
Enhancement of ultraviolet (UV) photoresponsivity in chemical-vapor-deposited (CVD) diamond photodetectors was observed by posttreatment in a plasma of oxygen and carbon tetrafluoride at room temperature. This room-temperature plasma posttreatment was found to be an efficient process in suppressing the extrinsic photoresponse of CVD diamond UV photodetectors in the visible region. Nearly four orders of magnitude difference in the photoresponsivity between the UV and visible light regions were obtained. The results of photoluminescence mapping and Raman spectra indicate that this performance improvement may have resulted from the effective removal of the sp2-bonded carbon impurities and passivation of the silicon-vacancy defects in the diamond.


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