Two-dimensional growth of continuous Cu2O thin films by magnetron sputtering

Yin, Z. G.; Zhang, H. T.; Goodner, D. M.; Bedzyk, M. J.; Chang, R. P. H.; Sun, Y.; Ketterson, J. B.
February 2005
Applied Physics Letters;2/7/2005, Vol. 86 Issue 6, p061901
Academic Journal
We present results on the in situ, two-dimensional growth (as opposed to the more commonly encountered island-coalescence mechanism) of continuous epitaxial Cu2O films on MgO(011) using dc facing-magnetron sputtering from metallic Cu targets in an oxygen/argon atmosphere. Film growth was studied as a function of deposition time and the dc power applied to the guns. Control of the latter leads to either continuous or island-/rodlike film morphologies.


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