Demonstration of low-cost Si-based tunable long-wavelength resonant-cavity-enhanced photodetectors

Mao, R. W.; Zuo, Y. H.; Li, C. B.; Cheng, B. W.; Teng, X. G.; Luo, L. P.; Yu, J. Z.; Wang, Q. M.
January 2005
Applied Physics Letters;1/17/2005, Vol. 86 Issue 3, p033502
Academic Journal
A simple process for fabricating low-cost Si-based continuously tunable long-wavelength resonant-cavity-enhanced (RCE) photodetectors has been investigated. High-contrast SiO2/Si(Δn∼2) was employed as mirrors to eliminate the need to grow thick epitaxial distributed Bragg reflectors. Such high-reflectivity SiO2/Si mirrors were deposited on the as-grown InGaAs epitaxy layers, and then were bonded to silicon substrates at a low temperature of 350 °C without any special treatment on bonding surfaces, employing silicate gel as the bonding medium. The cost is thus decreased. A thermally tunable Si-based InGaAs RCE photodetector operating at 1.3–1.6 μm was obtained, with a quantum efficiency of about 44% at the resonant wavelength of 1476 nm and a tuning range of 14.5 nm. It demonstrates a great potential for industry processes.


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