TITLE

Ultrasound radiating performances of piezoelectric micromachined ultrasonic transmitter

AUTHOR(S)
Wang, Zhihong; Zhu, Weiguang; Tan, Ooi Kiang; Chao, Chen; Zhu, Hong; Miao, Jianmin
PUB. DATE
January 2005
SOURCE
Applied Physics Letters;1/17/2005, Vol. 86 Issue 3, p033508
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter reports on a membrane-type piezoelectric micromachined ultrasonic transducer (pMUT). It consists of 3.5 or 7 μm thick composite lead zirconate titanate (PZT) film on a multilayered membrane and works as an ultrasonic transmitter. The ultrasound-radiating performance of the transmitter, in response to a continuous ac driving voltage, has been tested systematically. The generated sound pressure level at resonance frequency of the transmitter varies with the applied dc bias and driving voltage and can exceed 110 dB at a measuring distance of 12 mm. For a given square membrane with the same multilayer structure and thickness, the resonance frequency of the transmitter is inversely proportional to the area of the membrane, and can be further tuned by control of the poling conditions of the PZT film or the applied dc bias.
ACCESSION #
16345251

 

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