TITLE

Molecular contamination monitoring for 193nm litho

PUB. DATE
February 2005
SOURCE
Microlithography World;Feb2005, Vol. 14 Issue 1, p16
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Features the TMB-193 and the LithoScout toolset for detecting and measuring ultralow levels of molecular contamination in lithography processes from Extraction Systems. Key features; Structure of the toolset; Specifications.
ACCESSION #
16070897

 

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