TITLE

Overlay tool extends to 65nm and beyond

PUB. DATE
February 2005
SOURCE
Microlithography World;Feb2005, Vol. 14 Issue 1, p16
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the decision of Accent Optical Technologies, a supplier of lattice engineering and photolithography process-control tools, to extend its 90nm Calipher platform with the Calipher élan 300nm overlay tool. Comparison of the tool's output with its competitors; Components of the overlay tool; Various configurations of the tool.
ACCESSION #
16070887

 

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