Lambda Physik ceases litho product development

February 2005
Microlithography World;Feb2005, Vol. 14 Issue 1, p14
Trade Publication
Reports on the decision of Lambda Physik, subsidiary of Coherent Inc., to discontinue its future product development and investments in the semiconductor lithography sector as of February 2005. Reason behind the decision of the company; Analysis of the market conditions of the company's 193nm LithoTex laser.


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