TITLE

Lambda Physik ceases litho product development

PUB. DATE
February 2005
SOURCE
Microlithography World;Feb2005, Vol. 14 Issue 1, p14
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the decision of Lambda Physik, subsidiary of Coherent Inc., to discontinue its future product development and investments in the semiconductor lithography sector as of February 2005. Reason behind the decision of the company; Analysis of the market conditions of the company's 193nm LithoTex laser.
ACCESSION #
16070881

 

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