TITLE

Designing a bottom antireflection coating

AUTHOR(S)
Mack, Chris A.
PUB. DATE
February 2005
SOURCE
Microlithography World;Feb2005, Vol. 14 Issue 1, p12
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Provides information on designing a bottom antireflection coating. Information on bottom antireflection coefficient (BARC); Variables that can be adjusted when designing a BARC material; Lists of solutions to the optimum BARC problem.
ACCESSION #
16070869

 

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