Designing a bottom antireflection coating

Mack, Chris A.
February 2005
Microlithography World;Feb2005, Vol. 14 Issue 1, p12
Trade Publication
Provides information on designing a bottom antireflection coating. Information on bottom antireflection coefficient (BARC); Variables that can be adjusted when designing a BARC material; Lists of solutions to the optimum BARC problem.


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