Optical properties of stoichiometric LiNbO3 waveguides formed by low-dose oxygen ion implantation

Xue-Lin Wang; Ke-Ming Wang; Feng Chen; Gang Fu; Shi-Ling Li; Hong Liu; Lei Gao; Ding-Yu Shen; Hong-Ji Ma; Rui Nie
January 2005
Applied Physics Letters;1/24/2005, Vol. 86 Issue 4, p041103
Academic Journal
The planar waveguides in z-cut stoichiometric LiNbO3 crystal have been fabricated by 3.0 MeV oxygen ion implantation with the dose of 6×1014 ions/cm2 at room temperature. The modes of the waveguides were measured by the prism-coupling method with the wavelength 633 and 1539 nm, respectively. The refractive index profiles of the waveguides were reconstructed using reflectivity calculation method. The Rutherford backscattering/channeling technique was used to investigate the damage produced by the ion implantation, the minimum yield of the spectra was 4.52%. The propagation loss of waveguide was 0.61 dB/cm obtained by fiber probe technique. It was found that positive changes of extraordinary refractive indices happened in the guiding regions, and such change increased after the annealing treatment at 260 °C for 60 min.


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