High-Q whispering-gallery modes in GaAs/AlOx microdisks

Peter, E.; Sagnes, I.; Guirleo, G.; Varoutsis, S.; Bloch, J.; Lemaître, A.; Senellart, P.
January 2005
Applied Physics Letters;1/10/2005, Vol. 86 Issue 2, p021103
Academic Journal
We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-μm-diam microdisks.


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