Ion energy uniformity in high-frequency capacitive discharges

Perret, A.; Chabert, P.; Jolly, J.; Booth, J.-P.
January 2005
Applied Physics Letters;1/10/2005, Vol. 86 Issue 2, p021501
Academic Journal
Ion energy distribution functions and ion fluxes in low-pressure, high-frequency (13.56–80 MHz) capacitive discharges were investigated both theoretically and experimentally. In most of the conditions explored, the ion energy distribution function was a single peak centered at the time-averaged plasma potential. Lower energy ions with higher fluxes are obtained as the frequency increases. The uniformity of the ion energy across large-area electrodes (40 cm2) was also studied in conditions under which the standing wave effect is important, i.e., conditions such that the rf voltage and the ion flux are strongly nonuniform. Unlike the latter quantities, the ion energy was uniform across the reactor at all frequencies, due to dc current flowing radially in the plasma and in the electrodes.


Related Articles

  • Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors. Howling, A.A.; Sansonnens, L.; Ballutaud, J.; Hollenstein, Ch.; Schmitt, J.P.M. // Journal of Applied Physics;11/15/2004, Vol. 96 Issue 10, p5429 

    In small area capacitive reactors, the rf and dc components of the plasma potential can be assumed to be uniform over all the plasma bulk because of the low plasma resistivity. In large area reactors, however, the rf plasma potential can vary over a long range across the reactor due to rf...

  • 3D Unsteady State MHD Modeling of a 3-Phase AC Hot Graphite Electrodes Plasma Torch. Rehmet, Christophe; Rohani, Vandad; Cauneau, François; Fulcheri, Laurent // Plasma Chemistry & Plasma Processing;Apr2013, Vol. 33 Issue 2, p491 

    We present, in this paper, the magnetohydrodynamic (MHD) modeling of a three-phase plasma torch. The MHD equations are solved using CFD software Code Saturne, a computational fluid dynamics software which is based on colocated finite volume. The model developed is 3-D, time dependent, and...

  • Energy flow through a nonambipolar Langmuir sheath. Dorf, L. A.; Semenov, V. E. // Physics of Plasmas;Jul2009, Vol. 16 Issue 7, p073501 

    When electrons travel through the sheath toward a plasma-facing surface, they lose a part of their kinetic energy due to the negative work of the electric field in the sheath. What happens to this energy? Does it need to be accounted for if one needs to calculate an energy flux to a wall? In...

  • Generation of a Homogeneous Plasma and Wide Ion Beams in a Penning System with a Nonequipotential Cathode. Nikulin, S. P.; Chichigin, D. F.; Tretnikov, P. V. // Technical Physics;Sep2004, Vol. 49 Issue 9, p1142 

    A study is made of the possibility of controlling the spatial distribution of the degree of ionization in a modified Penning cell with a cathode divided into several sections that are at different potentials. It is shown that an almost uniform plasma can be produced when applying an optimal...

  • Production of wavelength-selective, time-resolved, x-ray images of a neon plasma in the SPEED 2 plasma focus. Bobashev, S. V.; Simanovskiı, D. M.; Decker, G.; Kies, W.; Röwekamp, P.; Zol’, Kh.; Berntin, U. // Technical Physics Letters;Apr97, Vol. 23 Issue 4, p316 

    The dynamics of pinching of a neon plasma in the SPEED 2 facility has been investigated by recording wavelength-selective, x-ray images of the plasma with good space and time resolution. A series of images of the plasma focus was obtained on the λ = 1.21 nm and λ = 1.35 nm emission lines...

  • Kink stability of long ion layers. Ishida, Akio // Physics of Fluids (00319171);Aug86, Vol. 29 Issue 8, p2588 

    By means of the two-fluid model, the kink stability of a long thin field-reversed ion layer immersed in a dense low-temperature background plasma is studied theoretically. The two-fluid variational quadratic form with the assumption of rigid displacements in the radial direction yields a new...

  • Observation of radio-frequency ion heating in a double plasma device. Schott, L. // Physics of Fluids B: Plasma Physics;Jun93, Vol. 5 Issue 6, p1774 

    When a sinusoidal voltage with an angular frequency in the range ωpi≤ω0≤10ωpi and an amplitude of 0≤A (Vrms)<1.6Te (eV) is applied to the separating mesh of a double plasma device, the temperature of the ions passing through the mesh increases approaching that of...

  • The probe diagnostics of free-burning arc in the atmosphere. German, V.; Ershov, A.; Kozlov, P.; Lyubimov, G.; Kopyl, P.; Surkont, O. // High Temperature;Aug2009, Vol. 47 Issue 4, p480 

    A procedure of ac probe measurements is suggested for spatially unstable and unsteady-state atmospheric-pressure plasma. The procedure is evaluation tested by way of measuring the distribution of concentrations of charged particles in the interelectrode space of extended arc with graphite...

  • Design of a high particle flux hydrogen helicon plasma source for used in plasma materials interaction studies. Goulding, R. H.; Chen, G.; Meitner, S.; Baity, F. W.; Caughman, J. B. O.; Owen, L. // AIP Conference Proceedings;11/26/2009, Vol. 1187 Issue 1, p667 

    Existing linear plasma materials interaction (PMI) facilities all use plasma sources with internal electrodes. An rf-based helicon source is of interest because high plasma densities can be generated with no internal electrodes, allowing true steady state operation with minimal impurity...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics