Array of luminescent Er-doped Si nanodots fabricated by pulsed laser deposition

Park, Seung Min; Bae, Chang Hyun; Nam, Woosung; Park, Sung Chan; Ha, Jeong Sook
January 2005
Applied Physics Letters;1/10/2005, Vol. 86 Issue 2, p023104
Academic Journal
Ordered arrays of Er-doped Si nanodots were fabricated by pulsed laser deposition using an anodic aluminum oxide (AAO) nanopore membrane. Er-doped Si (Si:Er) nanodots with an average diameter of 60–80 nm and a periodicity of 100 nm were uniformly assembled into hexagonally ordered nanopores of AAO membrane. Photoluminescence (PL) spectra taken from Si:Er nanodots showed an emission peak at 1.54 μm, which is due to intra-4f shell transition (4I13/2→4I15/2) of Er3+ ions. Postannealing of nanodot arrays up to 500 °C resulted in the enhancement of PL intensities without enlargement or aggregation of the nanodots.


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